Contributor info: Prof. Mangirdas Malinauskas

Meguya Ryu, Simonas Varapnickas, Darius Gailevicius, Domas Paipulas, Eulalia Puig Vilardell, Zahra Khajehsaeidimahabadi, Saulius Juodkazis, Junko Morikawa, Mangirdas Malinauskas

SciPost Phys. Core 7, 059 (2024) · published 30 August 2024 | Toggle abstract · pdf

Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of $\sim 6\pm 1~\mu$m thickness were determined at visible and IR (2.5-13~$\mu$m) spectral ranges and where $2.2\pm 0.2$ at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution.