TY  - JOUR
PB  - SciPost Foundation
DO  - 10.21468/SciPostPhysCore.7.3.059
TI  - Interferometric microscale measurement of refractive index at VIS and IR wavelengths
PY  - 2024/08/30
UR  - https://scipost.org/SciPostPhysCore.7.3.059
JF  - SciPost Physics Core
JA  - SciPost Phys. Core
VL  - 7
IS  - 3
SP  - 059
A1  - Ryu, Meguya
AU  - Varapnickas, Simonas
AU  - Gailevicius, Darius
AU  - Paipulas, Domas
AU  - Vilardell, Eulalia Puig
AU  - Khajehsaeidimahabadi, Zahra
AU  - Juodkazis, Saulius
AU  - Morikawa, Junko
AU  - Malinauskas, Mangirdas
AB  - Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of $\sim 6\pm 1~\mu$m thickness were determined at visible and IR (2.5-13~$\mu$m) spectral ranges and where $2.2\pm 0.2$ at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution.
ER  -

@Article{10.21468/SciPostPhysCore.7.3.059,
	title={{Interferometric microscale measurement of refractive index at VIS and IR wavelengths}},
	author={Meguya Ryu and Simonas Varapnickas and Darius Gailevicius and Domas Paipulas and Eulalia Puig Vilardell and Zahra Khajehsaeidimahabadi and Saulius Juodkazis and Junko Morikawa and Mangirdas Malinauskas},
	journal={SciPost Phys. Core},
	volume={7},
	pages={059},
	year={2024},
	publisher={SciPost},
	doi={10.21468/SciPostPhysCore.7.3.059},
	url={https://scipost.org/10.21468/SciPostPhysCore.7.3.059},
}