Interferometric microscale measurement of refractive index at VIS and IR wavelengths
Meguya Ryu, Simonas Varapnickas, Darius Gailevicius, Domas Paipulas, Eulalia Puig Vilardell, Zahra Khajehsaeidimahabadi, Saulius Juodkazis, Junko Morikawa, Mangirdas Malinauskas
SciPost Phys. Core 7, 059 (2024) · published 30 August 2024
- doi: 10.21468/SciPostPhysCore.7.3.059
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Abstract
Determination of refractive index of micro-disks of a calcinated ($1100^\circ$C in air) photo-resist SZ2080$^\mathrm{TM}$ was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of $\sim 6\pm 1~\mu$m thickness were determined at visible and IR (2.5-13~$\mu$m) spectral ranges and where $2.2\pm 0.2$ at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution.
Supplementary Information
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Authors / Affiliations: mappings to Contributors and Organizations
See all Organizations.- 1 Meguya Ryu,
- 2 Simonas Varapnickas,
- 2 Darius Gailevicius,
- 2 Domas Paipulas,
- 2 Eulalia Puig Vilardell,
- 3 Zahra Khajehsaeidimahabadi,
- 2 3 4 Saulius Juodkazis,
- 4 Junko Morikawa,
- 2 Mangirdas Malinauskas
- 1 産業技術総合研究所 / National Institute of Advanced Industrial Science and Technology [AIST]
- 2 Vilniaus universitetas / Vilnius University
- 3 Swinburne University of Technology
- 4 東京工業大学 / Tokyo Institute of Technology [TIT]